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Reading and Analyzing Research Literature
Choose a paper from the J. Vacuum Science and Technology about a topic of interest related to integrated circuit fabrication. Read the paper carefully. Refer to other sources for unknown terms or concepts. Note: Avoid papers with the word review in the title. They will be comprehensive reviews of a specific topic. They are good to read to familiarize yourself with an area but are typically very long and not as focused as a regular article.
Write a concise and coherent analysis of the paper you have chosen with a nice flow (do not simply list the answers to the questions below). Submit your analysis AND a copy of the paper on BlackBoard. In your analysis, provide the following information about the paper.
Does the abstract contain the critical components of an abstract? If so, highlight them. If not, discuss which ones are missing.
List two important facts related to the topic that were described in the introduction.
Is previous research reviewed and cited appropriately? What is different about this published work compared to previous work cited in the background section?
What is/are the main research questions or objectives for this article? Do not simply restate them; discuss them.
List a few of the methodologies used to conduct the research.
How are the results presented? Table, graphs, charts? Are they easy to understand? Be specific.
What terms or concepts were unfamiliar? How did you approach this?
List at least one research result from the study and comment on the result.
What implications or suggestions, if any, are offered for future research?